Bulk Gas Delivery System

The bulk gas delivery system is a specialized system designed for storing, transporting, and utilizing large quantities of gases. It primarily consists of a gas supply system and a pipeline system. The gas supply system comprises components such as gas sources, purification systems, and quality monitoring mechanisms to ensure the quality and stability of the gases. Meanwhile, the delivery pipelines are designed according to specific requirements to control the flow rate and pressure changes during gas transportation, ensuring safe and efficient delivery.

This system is widely used in various fields, especially those industries with high gas demand. In large-scale manufacturing facilities for ultra-large-scale integrated circuits, the bulk gas delivery system stably supplies various specialty gases such as SiH4, N2O, and C2F6, meeting the stringent process requirements. It also plays a crucial role in solar cell production lines, LED epitaxial growth processes, LCD display manufacturing, as well as optical fiber and silicon material epitaxial production lines.

In these applications, the bulk gas delivery system not only improves production efficiency and reduces costs but also ensures stability and safety. Additionally, it meets strict requirements for gas purity, thereby guaranteeing product quality and production safety.

With the continuous development of the microelectronics industry, the demand for ultra-clean gases is increasing, posing higher requirements for the cleanliness and stability of the bulk gas delivery system. Therefore, the research and development of this system are constantly progressing and improving to meet the changing market demands.

Overall, with its efficient, stable, and safe characteristics, the bulk gas delivery system is playing an increasingly important role in industrial production, energy development, scientific research, and other fields.

Here are some specific examples of the application cases of bulk gas delivery systems:

1. Pneumatic Transportation of Cement Plant Return Ash: A cement plant has adopted a dense-phase pneumatic transportation system, which uses compressed gas as the power source to transport the return ash through a pneumatic pump and transportation pipelines to a designated cement return ash receiving bin. This system transports the ash entirely within enclosed pipelines, without any dust emission or leakage points, ensuring a safe and clean production environment. At the same time, the system achieves fully automated operation and control through a PLC automatic programming and microcomputer control system, greatly improving production efficiency and safety.

2. Semiconductor Manufacturing: In the semiconductor production process, there are extremely high requirements for gas purity and supply stability. Therefore, many semiconductor manufacturers adopt bulk gas delivery systems to supply fine bulk gases such as nitrogen, oxygen, and hydrogen. These systems use ultra-high-pressure gas transportation technology to ensure gas purity and stability, thereby guaranteeing the quality and integrity of chip production.

3. Medical Device Additive Manufacturing: Additive manufacturing (AM) is increasingly being used in the production of medical devices. In the PBF process, the use of the correct amount of ultra-high-pressure nitrogen or argon can improve structural integrity. Therefore, bulk gas delivery systems are also used to provide high-quality gas supplies for additive manufacturing of medical devices, ensuring the quality and performance of the manufactured medical devices.

These application cases are just a small part of the bulk gas delivery system's applications in various fields. In fact, its application scope is much broader. With the advancement of technology and the development of the industry, the bulk gas delivery system will continue to provide efficient and stable gas supply solutions for more industries.